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Home Products Photovoltaic Industry / Graphite Seed-chucks for the Production of Polysilicon
Our high purity graphite products are extensively used in reactors and converters in the manufacturing process for high-purity polysilicon, the raw material of the silicon wafers used in semiconductors and photovoltaic cells.
High pure graphite electrodes for the deposition of highly pure polysilicon.
Our high purity graphite products are extensively used in reactors and converters in the manufacturing process for high-purity polysilicon, the raw material of the silicon wafers used in semiconductors and photovoltaic cells.
Graphite electrodes， also called graphite seed-chucks, are mostly made from purified isostatic graphite. Graphite seed-chucks come into direct contact with the silicon seed.
Excellent Electrical Conductivity
Excellent Thermal Durability
Excellent Chemical Resistance
High purified products is available
High Purity: The most crucial aspect. Impurities in the graphite can diffuse into the polysilicon during the high-temperature process, reducing its purity and suitability for semiconductor applications. Trace elements like boron, phosphorus, and heavy metals must be minimized.
High Temperature Strength: Must maintain structural integrity at the high temperatures of the CVD process.
Thermal Conductivity: Contributes to uniform heating of the seed rods.
Electrical Conductivity: Essential for resistance heating of the seed rods.
Chemical Inertness: Should be resistant to attack from the silicon-containing gases and hydrogen at high temperatures.
Dimensional Stability: Minimal expansion or contraction during heating and cooling cycles to maintain good contact with the seed rods.
Machinability: The graphite needs to be easily machinable into the desired complex shapes.
Outgassing: Low outgassing characteristics at high temperatures. Gas released from the graphite can contaminate the polysilicon.
Surface Finish: A controlled surface finish can affect the adhesion and growth of the polysilicon layer.
Graphite is uniquely suited for this application due to:
High-Temperature Tolerance: It sublimes rather than melts at extremely high temperatures.
Good Thermal Conductivity: Helps in uniform heating.
Good Electrical Conductivity: Facilitates resistance heating.
Relatively Inert: Less reactive than many other materials at high temperatures in the presence of the process gases.Machinability: Can be machined into complex shapes required for optimal polysilicon growth.
Cost-Effective: Compared to other refractory materials that might meet the temperature requirements.
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